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AUGUST 6, 2008 -- SAN DIEGO, CA -- RASIRC(R), a manufacturer of liquid and gas purification and delivery systems, has sold multiple RASIRC steamers for wet thermal oxidation of vertical cavity surface-emitting lasers (VCSELs). The systems were purchased by major manufacturers in the United States and Asia for installation in each development lab. According to the company, the steamers improve yield in the manufacture of the oxide aperture in VCSELs, which is critical for laser performance. Yield is determined by the uniformity, growth rate, and contamination sensitivity of the film. Improvement is reportedly achieved by eliminating the oxygen carrier gas in the RASIRC steamer.
The steamer combines a clean steam generator and steam purification assembly into a single system. The steam generator converts deionized (DI) water into high flow, ultra-high purity (UHP) water vapor and the purifier assembly purifies clean steam to UHP steam by selective removal of dissolved gases, metals, and particulates to below levels of detection. The system provides an alternative to bubblers and vaporizers by eliminating the need for a nitrogen or argon carrier gas that can cause furnace uniformity challenges. The company says that only the RASIRC steamer technology can separate oxygen from the steam before entering the furnace.
"VCSEL yield is directly related to the precision of the oxide aperture structure. This hinges on the ability to deliver oxygen-free steam and to tightly control the temperature and water vapor uniformity, so the choice of the water vapor delivery system is critical," says founder and president Jeffrey Spiegelman. "The RASIRC steamer provides 100% of pure water vapor in a controlled fashion. This is an economical, safe, and very effective method for adding water for wet thermal oxidation."
Source: RASIRC
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